JPH0311650Y2 - - Google Patents

Info

Publication number
JPH0311650Y2
JPH0311650Y2 JP1986170035U JP17003586U JPH0311650Y2 JP H0311650 Y2 JPH0311650 Y2 JP H0311650Y2 JP 1986170035 U JP1986170035 U JP 1986170035U JP 17003586 U JP17003586 U JP 17003586U JP H0311650 Y2 JPH0311650 Y2 JP H0311650Y2
Authority
JP
Japan
Prior art keywords
low pressure
filter
pressure loss
clean room
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986170035U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6375733U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170035U priority Critical patent/JPH0311650Y2/ja
Publication of JPS6375733U publication Critical patent/JPS6375733U/ja
Application granted granted Critical
Publication of JPH0311650Y2 publication Critical patent/JPH0311650Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP1986170035U 1986-11-04 1986-11-04 Expired JPH0311650Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986170035U JPH0311650Y2 (en]) 1986-11-04 1986-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170035U JPH0311650Y2 (en]) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS6375733U JPS6375733U (en]) 1988-05-20
JPH0311650Y2 true JPH0311650Y2 (en]) 1991-03-20

Family

ID=31104396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170035U Expired JPH0311650Y2 (en]) 1986-11-04 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0311650Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2655399B2 (ja) * 1995-09-26 1997-09-17 ベニックス株式会社 クリーンルームの間仕切構造
JP2655400B2 (ja) * 1995-09-26 1997-09-17 ベニックス株式会社 クリーンルームの間仕切構造

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597836A (ja) * 1982-07-06 1984-01-17 Oshitari Kenkyusho:Kk 垂直層流式無塵室
JPS6099943A (ja) * 1983-11-02 1985-06-03 Hitachi Ltd クリ−ンル−ム

Also Published As

Publication number Publication date
JPS6375733U (en]) 1988-05-20

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